An Embedded Sensor System for Real-Time Detecting 5-DOF Error Motions of Rotary Stages
The geometric error motions of rotary stages greatly Gift Bags affect the accuracy of constructed machines such as machine tools, measuring instruments, and robots.In this paper, an embedded sensor system for real-time measurement of two radial and three angular error motions of a rotary stage is proposed, which makes use of a rotary encoder with m